Namely within the range of 40000, utilizing SMM. The studied structures are based on two supplies, PbZrTiO3 (Lead Zirconate Titanate) and PbMN-PbTiO3 (lead magnesium niobate-lead titanate), thereafter referred to PZT and PMN-PT. These dielectrics are gaining ever-growing significance for microwave applications inside the development of tuneable devices at microwave frequencies such as delay lines, filters and phase shifters [8,13,15,24,25]. They are also involved in high frequency switches [13,26] and magnetic sensors for healthcare requires [27,28]. Our structures exhibit, nevertheless, many structural defects related towards the rough and non-homogeneous nature from the high- layers as well as to neighborhood interlayers detachments and gaps. This results in considerable variations of your measured capacitances and dielectric constants dependent around the size of your capacitive structures, material density along with the frequency on the incident microwave. The present paper describes a detailed metrological method to investigate non-ideal, yet real-life, nanostructures and extract the dielectric continuous value of high- components. two. Components and Procedures 2.1. Experimental Set-Up Experiments are performed employing a 5600LS AFM (Commercial instruments are identified in this paper for technical clarity and usually do not imply recommendation or endorsement by the authors) interfaced using a N5230C Vector Network Analyser (VNA) from Keysight Technologies, Santa Rosa, CA, USA. Bulk platinum conductive AFM probes (Rocky Mountain Nanotechnologies, Salt Lake City, UT, USA) are used (spring continual kS = 18 N -1 ) in speak to mode. The AFM tip is connected to the RF source/receiver from the VNA by means of a homemade Mach-Zehnder form microwave interferometer, enabling the program to operate at several frequencies inside the range in between 0.five GHz and six.0 GHz [29]. The AFM is placed on an active anti-vibration table inside a glove box workstation (Mbraun, Garching, Germany) beneath nitrogen gas atmosphere at space temperature and modest relative humidity (RH 1 ). The whole set-up is installed within a shielded area, fitted using a controlled air conditioning system [29]. In addition, a calibrated AFM [30] (Veeco, Plainview, NY, USA) as well as a scanning electron microscope (SEM, Zeiss Ultra Plus equipped with an In-Lens detector and charge compensation) [31] are made use of to traceably measure dimensional parameters in the samples under study. 2.2. Samples two.2.1. Reference Samples Two capacitance Sutezolid Autophagy calibration kits (MC2 Technologies, Villeneuve-d`Ascq, France), 3-Chloro-5-hydroxybenzoic acid Agonist labelled A61 and A64, served as reference samples for the SMM calibration procedure. The calibration samples are composed of identical patterns, each such as 48 micro-capacitors2.two. Samples two.2.1. Reference SamplesNanomaterials 2021, 11,Two capacitance calibration kits (MC2 Technologies, Villeneuve-d`Ascq, France), 3 of 19 labelled A61 and A64, served as reference samples for the SMM calibration process. The calibration samples are composed of identical patterns, every such as 48 microcapacitors formed by a SiO2 dielectric layer (with diverse thicknesses by plateaus) sandwiched in between circular gold pads in addition to a thicknesses by plateaus) sandwiched formed by a SiO2 dielectric layer (with various highly boron-doped p-type Si (100) substrate.circular gold pads along with a very boron-doped p-type Si (one hundred) substrate. These involving These metal oxide semiconductor (MOS) capacitors are created for capacitance semiconductor (MOS) 200 aF to ten fF [21]. We’ve got recently values rang.